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The Dilase range

Kloé's core business is related to optical miniaturization and integration and thus to high-resolution lithography.
For about 10 years, Kloé has developed several generations of very high-resolution laser photolithography equipment, first for its in-house R&D activities, and then for the manufacturing and production of its integrated optical circuits.

Today, Kloé holds the world record for form factor (> 15) of patterns developed by laser lithography; this record is related to the exceptional optical depth of focus obtained by forming the laser beam in the "optical tube" of Dilase equipment.


Dilase equipment is available in 3 ranges :

Dilase 250

This entry level range equipment offers the possibility of pattern photolithography from a constant UV beam size selected from the range 2µm/100µm with an aspect ratio of at least 15 on substrates ranging up to 4-inches in diameter.







Dilase 650

This equipment offers the possibility of pattern photolithography with UV beam sizes (up to 2 different ones) selected from the range 1µm/100µm, with an aspect ratio of at least 15 on substrates ranging up to 6 inches in diameter.






Dilase 750

This very high-end equipment is made to your own specifications, it offers a capacity of pattern photoloithography with UV beam sizes and several UV laser sources (up to 3 different ones) selected from the range 0.5µm/100µm, with a large aspect ratio on an as yet undefined work surface (400mm x 400mm, 12 inches in diameter ...)


Kloé software for lithography

DilaseSoft

Dilase Soft

Kloé's ability to develop software solutions corresponding to its needs gives Kloé a consistency at all levels of its activity. Design tools, industrial machine control and operation reporting are specifically designed by and for engineers using them. Thus, we guarantee that these tools precisely meet the needs for which they have been conceived.

In addition, Kloé develops custom solutions to satisfy its partners' needs in terms of computer aided design and teaching by comprehension and visualization of optical phenomena.

DilaseSoft is installed as standard on all Dilase commercial range equipment.

DilaseSoft software was developed to control Dilase lithography equipment and performs the production of all types of designs by laser direct writing. Ergonomy and performance have guided the development of this software.

User friendly modes of operation allow for the simple automation of complex production tasks. Expert operating modes provide access to more advanced features of this equipment, including the use of customized execution scripts to meet the specific needs of individual users.

Perfectly suited to a multi-user mode of operation, this software suite provides concrete answers to the current microfabrication requirements, from prototyping to series production.


Kloé Design and Kloé Softwave

Kloe Design & Kloe Softwave

Kloé Softwave is software dedicated to the design and simulation of integrated optical components.

Its library contains complex circuits ranging from simple such as couplings to more complex such as AWG (Arrayed Waveguide grating).

Simulation tools employ BPM2D and BPM3D algorithms. They are used to visualize and accurately study the physical properties during signal propagation and to quantitatively evaluate design performance.

Kloé Design is computer aided design software. It allows you to quickly conceive all types of design or microfluidic, microelectronic, or optical circuits thanks to a predefined database included by default.

Moreover, Kloé Design supports standard industry formats (such as DXF and GDSII) in order to be quickly integrated in your production environment.