The core business of Kloé is related to optical miniaturization and thus to high resolution lithography.
Since its creation in 2000, Kloé developed several generations of very high resolution laser lithography equipment, first for its R&D activities, and then for the production of its integrated optical circuits.

Today, Kloé holds a world record of form factor (>15) of patterns developed by laser lithography; this record is related to the exceptional optical depth of field obtained by forming the laser beam in the “optical tube” of Dilase equipments.

Dilase equipments is available in 3 ranges :

• Dilase 250 : Tabletop range equipment
• Dilase 650 : High resolution direct laser writing equipment
• Dilase 750 : High level, high flexibility equipment (view our video here)

Dilase 250 (1.66 MB)
Dilase 650 (1.98 MB)
Dilase 750 (1.86 MB)