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UV-KUB : an insolator-masker based on UV-LED emitting at 365nm, 375nm, 385nm

Kloé, already know as a leading company in photowriting process, through its Direct Laser writing technology « Dilase », commercializes UV-KUB, a new range of equipments dedicated to photosensitive layers UV curing. UV-KUB is an insolator/masker based on UV-LED emitting at 365nm, 375nm, 385nm.

This compact equipment (26x26x26 cm3) can be used to cure wafers from 1 to 4 inches. It can also work as a masker in hard or soft contact configurations, thanks to a mask to wafer distance control exhibiting a resolution of 10µm. The equipment presents a large range of other advantages: ((click here)).